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Everything you need for quantum hardware engineering in the field.

"In a sense, the physical realization of a quantum computer is an automated 'scatterometry' of quantum logic gates." - Onri Jay Benally


scatter (physics): "The scattering of light, other electromagnetic radiation, or particles" — Oxford English Dictionary

-ometry: "The action, process, technique, or art of measuring" — Oxford English Dictionary


Primary URL for the repository: OJB-Quantum/QC-Hardware-How-To


Serious Quantum Information Science & Technology Courses Online, Up to the Graduate Level:

Name or Title Cost Link
School of Quantum, QuTech, TU Delft Free QuTech Academy
IQM Academy, IQM Free IQM Academy
IBM Quantum Learning, IBM Free IBM Quantum Learning
Quantum Computing for Natural Sciences, Open HPI, IBM Quantum Free Quantum Computing for Natural Sciences
Quantum Machine Learning, Open HPI, IBM Quantum Free Quantum Machine Learning
Topology in Condensed Matter, TU Delft Free Topology in Condensed Matter

Paid Quantum Programs (Can Be Audited for Free):

Course Name Cost Link
Hardware of a Quantum Computer Paid/Audit Hardware of a Quantum Computer
Machine Learning for Semiconductor Devices Paid/Audit Machine Learning for Semiconductor Quantum Devices
Professional Certificate, Quantum 301 Paid/Audit Quantum 301
Quantum Optics 1 Paid/Audit Quantum Optics 1
Quantum Optics 2 Paid/Audit Quantum Optics 2
Introduction to Quantum Transport Paid/Audit Introduction to Quantum Transport
Quantum Transport Paid/Audit Quantum Transport
Quantum Technology: Computing & Sensing, MicroMasters Paid/Audit Quantum Technology: Computing & Sensing
Quantum Espresso Training Paid Quantum Espresso Training

Another List for Serious Quantum Courses Online, Up to the Graduate Level, (Based on MIT OCW):

Course Name Link
Quantum Computation Quantum Computation
Introductory Quantum Mechanics I Introductory Quantum Mechanics I
Introductory Quantum Mechanics II Introductory Quantum Mechanics II
Quantum Mechanics I Quantum Mechanics I
Quantum Physics I Quantum Physics I
Quantum Physics II Quantum Physics II
Quantum Physics III Quantum Physics III
Quantum Information Science Quantum Information Science
Quantum Information Science I Quantum Information Science I
Quantum Information Science II Quantum Information Science II
Applied Quantum & Statistical Physics Applied Quantum & Statistical Physics
Computational Quantum Mechanics of Molecular & Extended Systems Computational Quantum Mechanics of Molecular & Extended Systems
Quantum Optical Communication Quantum Optical Communication
Quantum Electronics Quantum Electronics
Physics of Microfabrication Physics of Microfabrication
Magnetic Materials Magnetic Materials
Superconducting Magnets Superconducting Magnets
Applied Superconductivity Applied Superconductivity
Geometry & Quantum Field Theory Geometry & Quantum Field Theory
Quantum Theory I Quantum Theory I
Quantum Theory II Quantum Theory II
Quantum Theory of Radiation Interactions Quantum Theory of Radiation Interactions
Effective Field Theory Effective Field Theory
Strong Interactions: Effective Field Theories of QCD Strong Interactions: Effective Field Theories of QCD
Quantum Complexity Theory Quantum Complexity Theory
Relativistic Quantum Field Theory I Relativistic Quantum Field Theory I
Relativistic Quantum Field Theory II Relativistic Quantum Field Theory III
Relativistic Quantum Field Theory III Relativistic Quantum Field Theory III
Modern Quantum Many-Body Physics for Condensed Matter Systems Modern Quantum Many-Body Physics

Click Below To Access Quantum Chip Gallery, TU Delft
Quantum Integrated Circuits
More from the Chip Gallery

Some Example Google Colab Notebooks Authored by Onri
Josephson Junction Tunneling Prediction Open In Colab
Josephson Junction Fraunhofer Pattern Open In Colab
Coulomb Diamonds & Blockade Visualization Open In Colab
Quantum-Limited Parametric Amplification Visualization Open In Colab
Transverse Electromagnetic Wave Visualization Open In Colab
Pulse Shapes and Envelopes Visualization Open In Colab

Click here to render the notebooks in the browser: Jupyter Notebook Viewer


A copy of the Experimental Quantum Hardware Engineering booklet, written by Onri Jay Benally:

Click here for the PDF version.

Click here for the Overleaf version.


A copy of the Nanofabrication Technology for Quantum Chips document, written by Onri Jay Benally:

Click here for the PDF version.


An extended version of the video playlists below is available: Quantum Hardware Engineering

12 Critical Quantum Hardware Videos – Explanation of the Physical System:
Inside a Quantum Computer, with Prof. Andrea Morello
UNSW Quantum Computer Lab Visit, with Prof. Andrea Morello
Inside MIT: The Making of a Quantum Chip in the Cleanroom & Cryostat Tour, Kendall On Air with Rhie Lim
Exploring the IBM Quantum Lab with Dr. Olivia Lanes
RF & Microwave Engineering, Prof. Steve Ellingson
Coplanar Waveguides, An Informal Introduction, physgins
Resonance in High Quality Superconducting Circuits, physgins
Superconducting Qubit Architecture and Chip Design, Prof. Hiu Yung Wong
Superconducting Qubits for Analogue Quantum Simulation, Gerhard Kirchmair
Quantum Control Technologies: Pulses for Quantum Control, Prof. Christian Kurtsiefer
Build Your Own Quantum Computer @ Home, Yann Allain
Measuring the Liquid Helium Level in a Dewar, Prof. Eduardo da Silva Neto
22 Quantum Hardware Videos on Quantum Control/ Readout Equipment
Quality Factor Explained, Ralph Gable
A Spinor Model for Cascading Two Port Networks, 810Labs, Dr. Alex Arsenovic
Understanding S-Parameter Measurements, Rohde and Schwarz
Understanding VSWR and Return Loss, Rohde and Schwarz
Understanding VNA Calibration Basics, Rohde and Schwarz
Understanding Load Pull, Rohde and Schwarz
Understanding Material Measurements, Rohde and Schwarz
What is a Mixer? Modern RF & Microwave Mixers Explained, Marki Microwave
RF Isolator Teardown & Explanation, Analog Zeke
Cryogenics Electronics, Quantum Technologies Innovation Network & Innovate UK Business Connect
Introduction to TR Multicoax Series, Amphenol Ardent Concepts
Control of Superconducting Qubits, Zurich Instruments, Prof. Stefan Phillips
Quantum Applications in the Bluefors Measurement System, Bluefors, Dr. Russell Lake
Hands-on Superconducting Qubit Characterization, Zurich Instruments
High Speed Qubit Control, Tabor Electronics
Characterization to Resonator Measurements, Zurich Instruments
Qubit Control and Measurement Solutions, Zurich Instruments
Interfacing Superconducting Quantum Circuits with an RF Photonic Link, Qiskit, Dr. John Teufel
Silicon Photonic Quantum Computing – Towards Large-Scale Systems, PsiQuantum, Dr. Peter Shadbolt
Quantum Materials: from Characterization to Resonator Measurements, Zurich Instruments, Dr. Jim Phillips & Prof. Corey Rae McRae
Advanced Microwave Topics for Quantum Physicists, Tabor Electronics
Supporting the Development of Quantum/Superconducting Applications, Amphenol Ardent Concepts

Everything You Need for Experimental Quantum Hardware Engineering

University of Minnesota

Onri Jay Benally

This document is meant to provide some level of consolidation for those desiring to be involved with quantum hardware engineering. By doing one's best to maintain familiarity with these topics, it is possible to become one who designs, builds, tests, operates, and maintains real quantum machines - a quantum mechanic. Another possibility is to begin working on a doctorate degree in the associated field with these training resources on hand. There are many clickable links in this document, so it might be best to view it using a browser or PDF viewer.

My decision to share these resources is because they have been useful to me in my PhD work. This has been a very interesting path for me as a tribesman from the Navaho Nation. Here is the path: carpenter → electric vehicle researcher → nanotechnologist → quantum mechanic.

Please note that open access is a key theme held herein. Enjoy.

– Onri

Scan QR code to access digital downloadable version.


Creative Commons License

This work is licensed under the Creative Commons Attribution 4.0 International License.
To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ or send a letter to Creative Commons, PO Box 1866, Mountain View, CA 94042, USA.


Contents

  1. Open Access Quantum Device Tools
  2. Training Videos
  3. Books & References
  4. Quantum Hardware Lab Galleries
  5. Quantum-Applicable Degrees: BS to PhD
  6. Quantum Science Curriculum Example
  7. Shortcut into Quantum Hardware Engineering
  8. Most Useful Coding Topics for Hardware Engineers
  9. Quantum Career Opportunities

Chapter 1

Open Access Quantum Device Tools

Free tools for designing, simulating, & analyzing quantum/nano devices:

Tool URL
Semiconductor Process & Device Simulation (SILVACO, browser-based) https://nanohub.org/resources/silvacotcad
KLayout, Pattern Generation & Layout, Direct-Download https://www.klayout.de/build.html
Elmer FEM, Multiphysics Simulation Tool, Direct-Download https://www.csc.fi/web/elmer/binaries
COMSOL Superconducting Simulation Tool, Browser-Based https://aurora.epfl.ch/app-lib
scQubits, Superconducting Qubit Simulation Tool, Python-Based https://scqubits.readthedocs.io/en/v3.2/index.html
JosephsonCircuits, Superconducting Circuit Simulation Tool, Julia-Based https://github.com/kpobrien/JosephsonCircuits.jl
QTCAD, Spin Qubit Design/Simulation/Analysis, Python-Based https://docs.nanoacademic.com/qtcad/introduction
Qiskit Metal, Quantum Device & Circuit Design/Analysis, GUI & Python-Based https://github.com/qiskit-community/qiskit-metal#qiskit-metal
KQCircuits, Quantum Device & Circuit Design, KLayout GUI Python-Based https://iqm-finland.github.io/KQCircuits
Quantum Photonic Gate Array Simulation, Python-Based https://github.com/fancompute/qpga#quantum-programmable-gate-arrays
Quantum Photonics Design/Simulation/Fabrication, Analysis, Python-Based https://github.com/SiEPIC/SiEPIC-Tools#siepic-tools
Qubit Design & Fabrication Example (applies codes to run lithography machines...) https://github.com/OJB-Quantum/Qiskit-Metal-to-Litho#qiskit-metal-to-litho
GitHub Usage Tutorial https://github.com/OJB-Quantum/How-to-GitHub#how-to-use-github

Chapter 2

Training Videos

Related Open Access Lectures & Tutorials (Up to Graduate Level):

Title URL
Quantum Hardware Engineering https://youtube.com/playlist?list=PLbW5jviv4ckyjq-7YkZWeBwASv83XP2iL&si=WJYi6-7LaOHWTeUe
Quantum Transport (Prof. Sergey Frolov) https://youtube.com/playlist?list=PLtTPtV8SRcxjedflXwNPSI_fxvxwUCjsd&si=uMYihHIpNzvr7frL
Quantum Many-Body Physics (Prof. Luis Gregório Dias) https://youtube.com/playlist?list=PL6FyrZIBwD8LMWizZW1FUN2dS_l44yuiy&si=RrbVfAicG2dTmc0G
Quantum Matter (Prof. Steven Simon) https://youtube.com/playlist?list=PLrNpJOaBSWSCrLUO_tuKa5l5YJl0JNr1z&si=wJnXdU4PcJ8f7vQK
Quantum Computing Hardware & Architecture (Prof. Hiu Yung Wong) https://youtube.com/playlist?list=PLnK6MrIqGXsL1KShnocSdwNSiKnBodpie
Quantum Hardware Series (Onri Jay Benally, QuantumGrad & UMN) https://youtube.com/playlist?list=PLD9iE8dbH_2W0ww1HL1gSskSYPcSlf6cd&si=NMB2cWEB1Xnz2c16
Thermodynamics & Statistical Physics Playlist (Pazzy Boardman) https://youtube.com/playlist?list=PLVjZPwRzdu40ZWkRxvwjan9ZyIbVexzOK&si=EtjiJQyTwqjiolas
Solid State Devices (Prof. Gerhard Klimeck) https://youtube.com/playlist?list=PLtkeUZItwHK4Y5WBNdkc5zKUi3m3WbGHo&si=Y4rKg68Gjijpw1WG
Circuit Quantum Electrodynamics & Qubit Hamiltonian (Prof. G. Kirchmair) https://youtu.be/BAt2PFVQE3w?si=CRGE6VN5JS1vP82D
QuTech360 Seminars (TU Delft) https://youtube.com/playlist?list=PL5jmbd6SJYnOyp8OP-ZME8GgTlLFXbrqO&si=Dsfc8N0bf5hbIQbx
Josephson Junctions & SQUIDs (Prof. Kevin F. Kelly) https://youtu.be/sNOpmTWlMwk?si=O_0E8IpkrsV3oMog
Silicon Photonics & Photonic Integrated Circuits Overview (Ghent) https://youtube.com/playlist?list=PLuNPwP_PUkFRcW4apwKHC7oXSTyV3zPbv
Photonic Integrated Circuit Design (Ghent University) https://youtu.be/Zcle3hNmblg
Virtual Hands-On Fabrication at MIT.nano (Dr. Jorg Scholvin) https://youtu.be/01J8qKjcp0M
Micro & Nanofabrication (Prof. Chris Mack) https://youtube.com/playlist?list=PLM2eE_hI4gSDjK4SiDbhpmpjw31Xyqfo_&si=laIs7hfXj8hZodlZ
Nanotechnology [Tools] (Duke University) https://youtube.com/playlist?list=PLQcKpS4i0cAHES0sjJTXDZnWa3wtuixQl&si=K6ERuGvia5zGwOMp
Qiskit Metal Overview, Gmsh & ElmerFEM [Open-Source] (Diego Emilio Serrano & Abeer Vaishnav) https://youtu.be/84j3l_9fHko?si=lS4x1df4iRt8gW7H
Pulse Sequence (Alexander, IBM) https://youtu.be/sMUPL8SR2oE?si=giO72SSrHTaRSu_C
Physical Sciences & Engineering Lectures (Dr. Jordan Edmunds) https://www.youtube.com/@JordanEdmundsEECS/playlists
Animated Physics Lectures (ZAP Physics) https://www.youtube.com/@zapphysics/playlists
More Animated Physics Lectures (Alexander Fufaev) https://www.youtube.com/@fufaev-alexander/playlists
Even More Animated Physics Lectures (Dr. Elliot Schneider) https://www.youtube.com/@PhysicswithElliot/playlists
Oscillator Tutorial (Afrotechmods) https://youtu.be/aJAZHPqEUKU?si=jNnQ8IxxQFjfv9ka
The Beauty of LC Oscillations! (Sabin Mathew) https://youtu.be/2_y_3_3V-so?si=BVMIz2ZGnLVbhLDz
Electronic Circuits (Julio Gonzalez) https://youtube.com/playlist?list=PL0o_zxa4K1BV9E-N8tSExU1djL6slnjbL&si=AbOrhVLQiJi2CW_s

Miscellaneous:

Title URL
A Homemade Trapped Ion Quantum Computer (Yann Allain) https://tinyurl.com/homemade-tr-ion
Heidelberg DWL66+ LASER Lithography Training (University of Pennsylvania) https://youtube.com/playlist?list=PLiihbHV9HgpWAcmgdpMGBkejcBhEzoKJO
Electron-Beam Lithography (MIT.nano) https://youtu.be/yJF9s2MJLLM
Layout Editor Training (University of Pennsylvania) https://youtube.com/playlist?list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&si=0Ac--reoSsnjvabf
KLayout Training (University of Waterloo) https://youtube.com/playlist?list=PL12BCN5zxKhysQPbl0Fy0a6x0fiCPJZB-&si=FyMEc9ANCNCAlLet
Introduction to KQCircuits https://youtube.com/playlist?list=PLZnE6Ohb-AKvK2ftKGBkKAellYGy7cUPR&si=aBGhPXxmBLSIghgE
Introduction to KQCircuits–Open-Source EDA Software for Designing Chips with Super Conducting Qubits https://youtu.be/FCrMdJdTVvY?si=mvxLbNz_ol5_KH2a
Oscilloscope Usage (GreatScottLab) https://youtu.be/d58GzhXKKG8?si=rdaIw9-qn7vyGCSk
Harvard Architecture vs. von Neumann Architecture (Computer Science) https://youtu.be/4nY7mNHLrLk?si=zztUmipDfU3tzg2E
Analog vs. Digital Computing (Derek Muller) https://youtu.be/IgF3OX8nT0w?si=9N2xnFssc0bXfEVA
Flipper Zero Transceiver Hardware (Securiosity) https://youtu.be/eYCMIYsP23k?si=bUO6aa7NB3P5c4Jn
Understanding Radio Signals with Flipper Zero (TechAndFun) https://youtu.be/zhg41DbxIEc?si=B0ceBRy1xi5Pr6bU
Software Defined Radio (SDR) Tutorial (Andreas Spiess) https://youtu.be/xQVm-YTKR9s?si=enSz492A77aX8WfK
The Fetch-Execute Cycle (Tom Scott) https://youtu.be/Z5JC9Ve1sfI?si=ATYnKMuothp3gxIv
Blender Basics for Scientists (Dr. Joseph G. Manion) https://youtube.com/playlist?list=PLcKSD7d0T-HBmOH-NYYgMgVX1LZF72K-3&si=K-Q0r_ntgwmQmV0o
Quantum Chip Rendering Tutorials (Onri Jay Benally) https://youtube.com/playlist?list=PLbW5jviv4ckwvvhSjwONc6pa-glNdI6vg&si=k91iBjwjTF4Spp6z

Chapter 3

Books & References

Free or Open Access Literature & More (Up to Graduate Level):

Title Link
Olivier Ezratty's "Understanding Quantum Technologies" https://doi.org/10.48550/arXiv.2111.15352
Olivier Ezratty's "Where are we heading with NISQ?" https://doi.org/10.48550/arXiv.2305.09518
Computer-Inspired Quantum Experiments https://doi.org/10.48550/arXiv.2002.09970
Open Hardware in Quantum Technology https://doi.org/10.48550/arXiv.2309.17233
Microwaves in Quantum Computing https://doi.org/10.1109/JMW.2020.3034071
The Transmon Qubit for Electromagnetics Engineers https://doi.org/10.48550/arXiv.2106.11352
Thomas Wong's "Introduction to Classical & Quantum Computing" https://www.thomaswong.net/introduction-to-classical-and-quantum-computing-1e3p.pdf
[Quantum] Transport in Semiconductor Mesoscopic Devices https://iopscience.iop.org/book/mono/978-0-7503-1103-8/chapter/bk978-0-7503-1103-8ch8
Quantum Materials Roadmap https://doi.org/10.1088/2515-7639/abb74e
Quantum Nanostructures https://doi.org/10.1016/B978-0-08-101975-7.00003-8
A Practical Guide for Building Superconducting Quantum Devices https://doi.org/10.1103/PRXQuantum.2.040202
Handbook of Vacuum Science & Technology https://www.sciencedirect.com/book/9780123520654/handbook-of-vacuum-science-and-technology
Practical Cryogenics http://research.physics.illinois.edu/bezryadin/links/practical%20Cryogenics.pdf
Hitchhiker's Guide to the Dilution Refrigerator https://www.roma1.infn.it/exp/cuore/pdfnew/Fridge.pdf
Dry Dilution Refrigerator with 4He-1 K-Loop https://doi.org/10.48550/arXiv.1412.3597
Engineering Cryogenic Setups for 100-Qubit Scale Superconducting Circuit Systems https://doi.org/10.1140/epjqt/s40507-019-0072-0
Modeling of Coplanar Waveguides (COMSOL) https://www.comsol.com/blogs/modeling-coplanar-waveguides
CPW Resonator for Circuit Quantum Electrodynamics (COMSOL) https://www.comsol.jp/model/download/1402321/models.rf.cpw_resonator.pdf
Quasiparticle Tunneling as a Probe of Josephson Junction Barrier & Capacitor Material in Superconducting Qubits [Qubit Design] https://doi.org/10.1038/s41534-022-00542-2
3D Integrated Superconducting Qubits https://doi.org/10.1038/s41534-017-0044-0
Optimization of Shadow Evaporation & Oxidation for Reproducible Quantum Josephson Junction Circuits https://doi.org/10.1038/s41598-023-31003-1
Improving Josephson Junction Reproducibility for Superconducting Quantum Circuits: Junction Area Fluctuation https://doi.org/10.1038/s41598-023-34051-9
Basic Qubit Characterization by Zurich Instruments https://docs.zhinst.com/hdawg_user_manual/tutorials/qubit_characterization.html?h=basic+qubit
Quantum Control Documentation by Qblox Instruments https://docs.qblox.com/en/main
Overview of Quantum Control Equipment by Qblox Instruments https://www.qblox.com
Control & Readout of a Superconducting Qubit Using a Photonic Link https://rdcu.be/dhLr3
A Cryogenic On-Chip Microwave Pulse Generator for Large-Scale Superconducting Quantum Computing https://doi.org/10.1038/s41467-024-50333-w
Spiderweb Array: A Sparse Spin-Qubit Array https://doi.org/10.1103/PhysRevApplied.18.024053
A Cryogenic Interface for Controlling Many Qubits https://www.microsoft.com/en-us/research/publication/a-cryogenic-interface-for-controlling-many-qubits
Probing Quantum Devices with Radio-Frequency Reflectometry https://doi.org/10.1063/5.0088229
Micromachined Quantum Circuits (Teresa Brecht) https://rsl.yale.edu/sites/default/files/2024-08/2017-RSL-Thesis-Teresa-Brecht-Final_ScreenVersion.pdf
High Fidelity Two-Qubit Gates on Fluxoniums Using a Tunable Coupler https://doi.org/10.1038/s41534-022-00644-x
Universal Fast-Flux Control of a Coherent, Low-Frequency Qubit https://doi.org/10.1103/PhysRevX.11.011010
Resonant and Traveling-Wave Parametric Amplification Near the Quantum Limit (Luca Planat) https://theses.hal.science/tel-03137118v1
Cryogenic Memory Technologies https://doi.org/10.48550/arXiv.2111.09436

Miscellaneous:

Title URL
NASA Wire Bonding Standards https://nepp.nasa.gov/index.cfm/20911
NASA Soldering & Workmanship Standards https://nepp.nasa.gov/docuploads/06AA01BA-FC7E-4094-AE829CE371A7B05D/NASA-STD-8739.3.pdf
https://standards.nasa.gov/sites/default/files/standards/NASA/A/4/nasa-std-87394a_w_change_4_0.pdf
https://workmanship.nasa.gov/lib/insp/2%20books/frameset.html
Semiconductor Education Online, Browser-Based, No Installation Required https://nanohub.org/groups/semiconductoreducation
Quantum Mechanics Visualization, Browser-Based https://www.st-andrews.ac.uk/physics/quvis
Classical Physics Simulation, Browser-Based https://phet.colorado.edu/en/simulations/browse
Classical 2D Optics Simulation, Browser-Based https://phydemo.app/ray-optics
Math, Physics, & Engineering Visualization, Browser-Based https://www.falstad.com/mathphysics.html
Interactive Advanced Microscopy Simulations, Browser-Based https://myscope.training
Interactive Quantum State Visualization, Browser-Based https://javafxpert.github.io/grok-bloch
Interactive Quantum Computing Education Tools https://www.iqmacademy.com/play
Quantum Phenomena Visualization https://toutestquantique.fr/en

Chapter 4

Quantum Hardware Lab Galleries

Lab Gallery Link
IBM Research https://www.flickr.com/photos/ibm_research_zurich/albums
ETH Zurich https://qudev.phys.ethz.ch/responsive/?q=gallery
UWaterloo https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/virtual-tours

Chapter 5

Quantum-Applicable Degrees: BS to PhD

(Non-Exhaustive List)

Physics (Experimental or Applied) Computer Engineering
Quantum Science & Engineering Chemistry
Quantum Technology Chemical Engineering
Engineering Physics Physical Chemistry
Electrical Engineering Systems Engineering
Electrical & Computer Engineering Mechanical Engineering
Materials Science Nanoscience
Materials Science & Engineering Nanoengineering

Chapter 6

Quantum Science Curriculum Example

Adapted From: https://quantum.cornell.edu/education

Courses
AEP 1200 Introduction to Nanoscience & Nanoengineering
AEP 2550 Engineering Quantum Information Hardware
AEP 3100 Introductory Quantum Computing
AEP 3610 Introductory Quantum Mechanics
AEP 3620 Intermediate Quantum Mechanics
AEP 4400 Nonlinear & Quantum Optics
AEP 4500 / PHYS 4454 Introductory Solid State Physics
CHEM 7870 Mathematical Methods of Physical Chemistry
CHEM 7910 Advanced Spectroscopy
CHEM 7930 Quantum Mechanics I
CHEME 6860 / SYSEN 5860 Quantum Computing & Artificial Intelligence
CS 4812 / PHYS 4481 Quantum Information Processing
ECE 4060 Quantum Physics & Engineering
ECE 4070 Physics of Semiconductors & Nanostructures
ECE 5310 Quantum Optics for Photonics & Optoelectronics
ECE 5330 Semiconductor Optoelectronics
MSE 5720 Computational Materials Science
MSE 6050 Physics of Semiconductors & Nanostructures
PHYS 2214 Physics III: Oscillations, Waves, & Quantum Physics
PHYS 3316 Basics of Quantum Mechanics
PHYS 3317 Applications of Quantum Mechanics
PHYS 4443 Intermediate Quantum Mechanics
PHYS 4444 Introduction to Particle Physics
PHYS 4410 / PHYS 6510 Advanced Experimental Physics
PHYS 6572 Quantum Mechanics I
PHYS 6574 Applications of Quantum Mechanics II
PHYS 7636 Solid-State Physics II
PHYS 7645 Introduction to the Standard Model of Particle Physics
PHYS 7651 Relativistic Quantum Field Theory I
PHYS 7652 Relativistic Quantum Field Theory II
PHYS 7654 Basic Training in Condensed Matter Physics

Chapter 7

Shortcut into Quantum Hardware Engineering

Checklist
Start with a 3D modeling & linguistics framework, may involve a custom keywords glossary.
Know that this specialty involves learning to probe something without necessarily having to physically contact its surface. This is what spectroscopy or “scatterometry” is about.
Typically, topics covered under quantum hardware engineering are combinations of materials science & engineering, quantum metrology, quantum transport, quantum optics, & quantum electronic design automation.
Know how electronic filters are configured or set up.
Know how electronic filters are designed & what they look like.
Know what components various filters are made of.
Know the difference between passive & active filters.
Know the difference between optical, microwave, & radio frequency (RF) isolators, circulators, & mixers.
Be aware of different room temperature & cryogenic amplifiers.
Know what room temperature & cryogenic amplifiers are made of.
Know the different types/hierarchy of amplifier noise (thermal, shot, external, quantum).
Know how a signal curve or response is manipulated.
Know how signals are triggered.
Know what impedance matching is (how many ohms is required).
Know how a Smith chart works.
Know the many purposes of a resistor (there’s a whole list).
Know what multiphase power means.
Know what a resonator & resonator cavity is.
Know what vector network & spectrum analyzers, arbitrary waveform generators, & signal generators do.
Know what an oscillator circuit does (voltage fluctuation or AC).
Know what an inverter circuit does (DC to AC conversion).
Know what a rectifier circuit does (AC to DC conversion).
Know what high-pass, low-pass, band-pass, band-stop filter circuits/crossover networks do (signal filtering).
Know what a comparator circuit does (threshold indicator).
Know what a few basic logic gates can do (calculator).
Know what a PID [closed-loop] controller does (electronic-based self-balancing).
Know what a feed forward [open-loop] controller does (electronic-based self-balancing alternative).
Bonus Project: Know how to build a simple electronic audio amplifier device (many components similar to quantum computing systems).
Bonus Project: Design a transmission line coupled to a resonator with optical or superconducting waveguides.

Chapter 8

Most Useful Coding Topics for Hardware Engineers

Topic
Library installation
Syntax & commenting
Curve fitting, direct parameterization, & mesh parameterization
Automation scripting
Data management & data structures
Parallel processing & accelerated computing techniques
Interpolation & extrapolation
Linear regression, polynomial regression, moving average regression, & other regression models
Signal processing
Noise plots
Manual debugging

Chapter 9

Quantum Career Opportunities

Quantum Job Resources (Hardware & Software):

URLs
Youtube: "Quantum Jobs" overview video
IEEE Paper on Quantum Roles & Skills
IBM Tech Tech Potato Quantum Jobs
Chicago Quantum Resources
Quantiki Jobs
Quantum Computing Jobs (Russ Fein)
Quantum Economic Development Consortium (QED-C) Jobs
Global Quantum Leap Opportunities
Chicago Quantum Internships
QuantumGrad.com Jobs

Supplementary Figures


Keywords & Terms To Look for When Reading a Technical Quantum-Related Article

Category Keywords & Terms
Quantum System Dynamics Drive, Excite, Qubit, Resonance, Coherence, Transition, State Transition, Rabi Frequency, Rabi Osciilation
Measurement & Readout Readout, Read Out, Read-out, Dependent, Reference, Convert, Converter, ADC, DAC
Signal Processing & Control Modulate, Pulse, Formulated, Power, Port
Quantum States & Behavior Ground, Flying, Static, Stationary, State Classification
Fabrication & Manufacturing Fabrication, Yield, Manufacture, Foundry, Compatible
Clarity & Verification Clear, Correct
Quantum Interactions Couple, Coupling, Entangle
Logical & Structural Concepts Prerequisite, Implement, Implemented, Implementation, Integrated
Analysis & Justification Compare, Compared, Justification, Justified, Motivation

Example of Linguistics Applied to Quantum Hardware Terminology

Breakdown of the term dispersion and its connection to the dispersive regime, first from an etymological and linguistic perspective, followed by its application in superconductivity.

Etymology & Linguistic Insight

Term Etymology & Linguistic Insight
Dispersion - Derived from Latin dispersio, from dispergere ("to scatter, spread out").
- Dis- ("apart") + spargere ("to scatter, sprinkle") → meaning "to spread apart or distribute."
- Commonly refers to the process of separation or spreading in various contexts: optics, fluid dynamics, and waves.
Dispersive - Adjective form of dispersion, indicating a system or medium where different components (e.g., waves, particles) separate due to frequency-dependent properties.
- In physics, this refers to how different frequencies propagate at different speeds, leading to wave dispersion.
Regime - From Latin regimen ("rule, system, guidance"), related to regere ("to guide, direct, rule").
- Indicates a domain or system characterized by a particular set of governing rules.

Linguistic Insight:

  • The root meanings emphasize the spreading or separation of components (dispersion) under specific rules or conditions (regime).
  • Thus, a dispersive regime is a domain where wave-like entities (e.g., electromagnetic waves, phonons, quasiparticles) experience frequency-dependent separation governed by a particular system.

Context in Superconductivity

Concept Description
Dispersion in superconductivity Refers to the relationship between the energy and momentum of excitations (e.g., quasiparticles, plasmons, phonons, or collective modes) in a superconducting system. This dispersion relation determines how these excitations propagate.
Dispersive regime A regime where the propagation characteristics of these excitations strongly depend on frequency. In superconducting circuits, this typically arises when the system exhibits nonlinear interactions, leading to frequency-dependent phase shifts and group velocity variations.
Example: Josephson junctions In superconducting circuits, Josephson junctions exhibit a dispersive regime where the nonlinear inductance causes frequency-dependent shifts in resonance conditions, critical for quantum computing and readout of superconducting qubits.
Example: Microwave resonators Superconducting microwave resonators interact with qubits via dispersive coupling, shifting their resonance frequency depending on the qubit state—a fundamental principle of circuit quantum electrodynamics (cQED).

Key Takeaway:

  • The dispersive regime in superconducting systems exploits frequency-dependent interactions to enable state-dependent measurements, non-demolition readout, and coherent quantum control in quantum computing.

The Quantum Workforce & Relevant Skills

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Borrowed from: Hughes et al., Assessing the Needs of the Quantum Industry, 2109.03601, p. 4 (2021)
https://doi.org/10.48550/arXiv.2109.03601
https://creativecommons.org/licenses/by-nc-nd/4.0/


1st & 2nd Quantum Revolution

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Borrowed from: Ezratty, Understanding Quantum Technologies, 2111.15352, p. 7 (2024)
https://doi.org/10.48550/arXiv.2111.15352
https://creativecommons.org/licenses/by-nc-nd/4.0/


Rough Zoology of All Physical Qubits

image

Borrowed from: Ezratty, Understanding Quantum Technologies, arXiv 2111.15352, p. 355 (2024)
https://doi.org/10.48550/arXiv.2111.15352
https://creativecommons.org/licenses/by-nc-nd/4.0/


Stationary vs. Flying Qubits:

Category Description
Requirements of Quantum Computing - Coherently Superpose or "Entangle" a large number of qubits
- Ability to address each qubit independently "local control"
- Fast gates "operations" before qubits decohere
Types of Qubits - Stationary qubits: Trapped/not in motion, easy to encode information, but hard to communicate
- Flying qubits: In motion by default, hard to encode information, but easy to communicate
Stationary Qubits - Trapped atoms
- Trapped ions
- Josephson junctions, $\pi$-Josephson junctions
- Quantum dots
- Defect atoms (donor/acceptor) in a strained matrix
- Nitrogen vacancies in Diamond
- Magnetic clusters
- Magnetic nanodisks
Flying Qubits - Photons
- Domain walls
- Phonons?
- Polaritons?
- Plasmons?
- Magnons?

Adapted from: Reinke et al., Phonon-Based Scalable Platform for Chip-Scale Quantum Computing, AIP Advances 6, 122002 (2016)
https://doi.org/10.1063/1.4972568
https://creativecommons.org/licenses/by-nc-nd/4.0/

Adapted from: Zou et al., Quantum Computing on Magnetic Racetracks with Flying Domain Wall Qubits, Phys. Rev. Research 5, 033166 (2023)
https://doi.org/10.1103/PhysRevResearch.5.033166
https://creativecommons.org/licenses/by-nc-nd/4.0/

Some Visualized Examples of Stationary & Flying Qubits:

Flying vs  Stationary Qubits

Borrowed from: Understanding Quantum Technologies, arXiv 2111.15352, p. 256 (2024)
https://doi.org/10.48550/arXiv.2111.15352
https://creativecommons.org/licenses/by-nc-nd/4.0/


Dilution Fridge Measurement System & Schematic

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Adapted from: Krinner et al., Engineering Cryogenic Setups for 100-qubit Scale Superconducting Circuit Systems, EPJ Quantum Technol. 6, 2 (2019)
https://doi.org/10.1140/epjqt/s40507-019-0072-0
https://creativecommons.org/licenses/by-nc-nd/4.0/


Cryogenic Dewar-Based Measurement System Using a Dipstick

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Borrowed from: Kiene et al., A 1-GS/s 6–8-b Cryo-CMOS SAR ADC for Quantum Computing, IEEE J. Solid-State Circuits 58, 7 10036483 (2023)
https://doi.org/10.1109/JSSC.2023.3237603
https://creativecommons.org/licenses/by-nc-nd/4.0/


Basic Reflection, Transmission, & Emission Measurement Setup Schematics for Quantum Hardware

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Borrowed from: Vigneau et al., Probing Quantum Devices with Radio-Frequency Reflectometry, Appl. Phys. Rev. 10, 021305 (2023)
https://doi.org/10.1063/5.0088229
https://creativecommons.org/licenses/by-nc-nd/4.0/


Physical Outcomes of Quantum Measurement

Quantum Platform Measurement Mechanism Observable Outcome Key Points / Notes
Superconducting Qubits Dispersive Readout
(cQED architecture)
- Shift in resonance frequency (phase/amplitude change of probe tone)
- Often measured via a Josephson parametric amplifier
- Qubit and resonator are detuned (dispersive regime), leading to a qubit-state-dependent frequency shift $(\pm \chi)$.
- Detecting transmitted/reflected microwave signal reveals whether the qubit is in $\lvert 1\rangle$ or $\lvert 0\rangle$.
- The measurement “collapses” the qubit state, producing a classical result that can be digitized.
Trapped Ions Fluorescence Detection
(e.g., electron shelving technique)
- Presence or absence of emitted photons (fluorescence) - A laser tuned to an electronic transition lights up one qubit state (“bright”) while another remains dark.
- Counting photons above a threshold indicates $\lvert 1\rangle$ or $\lvert 0\rangle$, collapsing the ion’s internal state.
- Non-resonant states do not fluoresce, providing a clear binary readout.
Semiconductor Spin Qubits Spin-Dependent Tunneling / Spin Blockade - Electron tunneling current or charge sensor signal - In gate-defined quantum dots, measuring the spin state uses energy-selective tunneling (e.g., Pauli spin blockade).
- A charge sensor (quantum point contact or single-electron transistor) detects whether an electron tunnels, indicating spin-up vs. spin-down.
- This process effectively “collapses” the spin state upon measurement.
NV Centers in Diamond Optical Fluorescence Readout - Photoluminescence intensity (count rate) - The spin state of the NV center (e.g., $(\lvert m_s = 0\rangle)$ vs. $(\lvert m_s = 1\rangle)$ affects the optical emission levels under laser illumination.
- Detecting the photoluminescence intensity indicates the spin state.
- Measurement collapses the NV center’s ground-state spin wave function into a definite eigenstate.
Photonic Qubits Single-Photon Detection / Homodyne Measurement - Detector “click” (photon arrival)
or continuous variable amplitude/phase
- In single-photon approaches, a photon counter (e.g., avalanche photodiode, superconducting nanowire) registers a detection event, collapsing the photonic mode.
- In continuous-variable systems, homodyne or heterodyne detection measures quadratures of the electromagnetic field, giving classical measurement outcomes that reveal quantum state information.
Neutral Atoms / Rydberg Atoms State-Selective Resonant Imaging / Fluorescence - Photon emission or ionization detection - Similar to trapped ions, a resonant laser can cause one hyperfine state to scatter photons (“bright”), while another remains dark.
- Rydberg atoms may also be ionized and detected in a channeltron or micro-channel plate detector. The presence/absence of an ion indicates the atomic state.
- The measurement outcome collapses the atomic qubit to a definite state in the chosen basis.
Superconducting Flux or Phase Qubits Switching Current / Flux Detection - Change in the current-voltage characteristics of the readout circuit - While cQED dispersive readout is common, some older or specialized superconducting designs measure flux qubits by detecting shifts in the SQUID magnetization or critical current.
- The wave function collapse is reflected in whether the circuit remains in a superconducting state or switches to a normal resistive state.

Expanded Explanation of Key Ideas:

  1. Wave Function Collapse

    • In the Copenhagen interpretation, a quantum system (e.g., a qubit) is described by a superposition of states until it is measured.
    • Collapse means the superposition is projected into an eigenstate of the measured observable, producing a classical result.
  2. Dispersive Readout (Superconducting)

    • The qubit–resonator system is designed so the qubit’s state modifies the resonator frequency slightly (the dispersive shift, $(\chi)$.
    • A microwave probe tone is sent through or reflected from the resonator, and the measured amplitude or phase shift reveals whether the qubit was $\lvert 0\rangle$ or $\lvert 1\rangle$.
  3. Variety of Measurement Mechanisms

    • Trapped Ions: Laser-induced fluorescence, where one qubit state fluoresces strongly and the other does not.
    • Semiconductor Spin Qubits: Charge sensing or spin blockade, often measured via a quantum point contact or single-electron transistor.
    • NV Centers: Optical readout of spin states via photoluminescence differences.
    • Photonic Qubits: Single-photon counters or homodyne detection, collapsing the photonic state.
    • Neutral Atoms: Fluorescence or ionization detection for Rydberg states.
  4. Outcome vs. Interpretation

    • Although each platform’s physical outcome is different (fluorescence photons, current pulses, microwave phase shift, etc.), the conceptual step of mapping a quantum state to a classical result is the same.
    • Each row describes a distinct platform or approach, the typical measurement mechanism, and the observable outcome that corresponds to the qubit’s final state (often $\lvert 0\rangle$, $\lvert 1\rangle$, or some multi-qubit extension).
  5. Measurement Fidelity & Qubit Readout

    • Designing a high-fidelity measurement is crucial for scalable quantum computing, ensuring that the classical outcome accurately reflects the qubit’s true state.
    • Techniques like Josephson parametric amplification in superconducting circuits reduce measurement noise, enabling single-shot readout.

Microwave & Baseband Control Requirements

Microwave Control
image
Baseband Control
image
Superconducting (Transmon) 1Q XY gates, 2Q gates
Carrier: 4-8 GHz
Pulse duration: 10-30 ns
𝜋-pulse P_av: -80 to -60 dBm
Shaped envelope
1Q Z gates, 2Q gates
0.01-1 ~mA static/pulsed
Pulse duration: 10-500 ns
Resolution: ~nA
Semiconductor Spin Single spin Q: 1Q XY gates
Carrier: 0.1-50 GHz
Pulse duration: 10 ns to 1 𝜇s
𝜋-pulse P_av: -60 to +0 dBm
Shaped envelope
Single spin Q: 2Q gates
S-T Q: XY gates, 2Q gates
E-O Q: XY gates, 2Q gates
𝜇V-mV level signals
Pulse duration: ns-ms
1 ns rise/fall
Trapped Ion 1Q XY & Z gates, 2Q gates
Carrier: 5-20 MHz, 1-12.6 GHz
Pulse duration: 1-500 𝜇s
𝜋-pulse P_av: 0 to 45 dBm
Rectangular envelope
Qubit state control typically not performed at baseband

Adapted from: Bardin et al., Microwaves in Quantum Computing, IEEE Journal of Microwaves 1, 1 9318753 (2021)
https://doi.org/10.1109/JMW.2020.3034071
https://creativecommons.org/licenses/by-nc-nd/4.0/


Typical Carrier Frequencies Used by Some of the Primary Qubit Technologies for Control & Readout

Carrier Frequencies

Borrowed from: Bardin et al., Microwaves in Quantum Computing, IEEE Journal of Microwaves 1, 1 9318753 (2021)
https://doi.org/10.1109/JMW.2020.3034071
https://creativecommons.org/licenses/by-nc-nd/4.0/


Qubit Rabi Oscillations & Their Fourier Transform

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Borrowed from: George et al., Multiplexing Superconducting Qubit Circuit for Single Microwave Photon Generation, J Low Temp Phys 189, 60–75 (2017)
https://doi.org/10.1007/s10909-017-1787-x
https://creativecommons.org/licenses/by-nc-nd/4.0/


Highlighted Quantum Noise Limits for Amplification (Including the Standard Quantum Limit)

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Adapted from: Vigneau et al., Probing Quantum Devices with Radio-Frequency Reflectometry Appl. Phys. Rev. 10, 021305 (2023)
https://doi.org/10.1063/5.0088229
https://creativecommons.org/licenses/by-nc-nd/4.0/


Block Diagram of an Embedded Cryogenic Complementary Metal Oxide Semiconductor (Cryo-CMOS) Qubit Controller & Readout Architecture

Cryo-CMOS Qubit Controller

Adapted from: Patra et al., Cryo-CMOS Circuits and Systems for Quantum Computing Applications, IEEE J. Solid-State Circuits, 53, 1 (2018)
https://doi.org/10.1109/JSSC.2017.2737549
https://creativecommons.org/licenses/by-nc-nd/4.0/


A 6 Superconducting Transmon Chip with Individual Drive Lines & Readout Resonators

Screenshot 2025-02-01 031533

Corresponding colors for figure
Green: readout line
Blue: readout resonator
Yellow: drive line or capacitor
Note: Bolometer chip is shown on the lower right.

Borrowed from: Gunyhó et al., Single-Shot Readout of a Superconducting Qubit Using a Thermal Detector, Nat Electron 7, 288–298 (2024)
https://doi.org/10.1038/s41928-024-01147-7
https://creativecommons.org/licenses/by-nc-nd/4.0/

Experimental Schematic for the 6 Superconducting Transmon Chip

Screenshot 2025-02-01 042032

Borrowed from: Gunyhó et al., Single-Shot Readout of a Superconducting Qubit Using a Thermal Detector, Nat Electron 7, 288–298 (2024)
https://doi.org/10.1038/s41928-024-01147-7
https://creativecommons.org/licenses/by-nc-nd/4.0/


A Simplified Experimental Schematic for a Tunable 2 Superconducting Transmon Chip

unnamed (5)

Borrowed from: Bardin et al., Microwaves in Quantum Computing, IEEE Journal of Microwaves 1, 1 9318753 (2021)
https://doi.org/10.1109/JMW.2020.3034071
https://creativecommons.org/licenses/by-nc-nd/4.0/


Quantum Hardware Categories

Category Functionality Examples
Projects Processor Design DASQA, KQCircuits, PainterQubits/Devices.jl, pyEPR, Qiskit Metal, QuCAT
Projects Simulation and diagnostics KQCircuits, Pulser, Qiskit Metal, QuTiP, QuTiP-QIP, sc-qubits, Strawberry Fields
Projects Control and data acquisition ARTIQ, Duke-ARTIQ, Qua $^{a}$, QCoDeS, QICK, Quantify, QubiC, Qudi, qupulse, Sinara Open Hardware
Facilities Remotely Accessible Labs $^{b}$ Forschungszentrum Jülich through OpenSuperQ, Quantum Inspire
Facilities Testing (Testbeds) Lawrence Berkeley National Lab's AQT, Open Quantum Design, Sandia National Labs' QSCOUT, Sherbrooke's Distriq DevTeQ, NQCC
Facilities Fabrication (Foundries) LPS Qubit Collaboratory, UCSB quantum foundry, QuantWare $^{c}$

$^{a}$ partially open-source
$^{b}$ excluding commercial providers
$^{c}$ private company with support for Qiskit Metal

Adapted from: Shammah, et al., Open Hardware Solutions in Quantum Technology, APL Quantum 1, 011501 (2024)
https://doi.org/10.1063/5.0180987
https://creativecommons.org/licenses/by-nc-nd/4.0/


Nanotechnology Used for Quantum Chips

Onri Jay Benally

February 2024

Table of Contents

I. Background & Motivation. II. Fabrication Tools vs. 3D Printing. III. The Lithography Design Process (Including 3D Modeling & Simulation). IV. Masked vs. Maskless Lithography (with Brief Overview of Deposition). V. Application Methods in Lithography Used for Quantum Devices. VI. Brief Overview of Packaging. VII. Conclusion. VIII. Examples of Hardware (Supplementary Images).

Layout of an IBM Quantum System 1 (IBM Research).

A quantum computing system can be described by the quantum stack, containing levels of abstraction. The software layer exists on the upper level, while the hardware layer is on the lower level. At the very bottom of this hardware level is the quantum chip, which comprises of a quantum processing unit (QPU). One may notice, in nearly every quantum computing platform, the processor comes in some form of a chip. It contains components that can exploit quantum effects depending on the material's physical properties. The overall control and conversion systems vary in size, however. Some can fit inside a desktop machine, while others take up the space of an entire building room, like early vacuum tube-based computers.

The DiVincenzo criteria is a guide that can be used to realize gate-based quantum computation, of which effects like quantum interference, entanglement, and superposition are highly important. Physical quantum bits (qubits) are primary components for making quantum logic gates, along with their controllers, converters, couplers, readout connectors, etc. To build these devices requires materials that are shapeable and can be patterned into useful objects, typically, a few nanometers thick. These are what we call nanoscale thin films. Many materials used in fabricating thin film devices for quantum are compatible with existing semiconductor fabrication tools (i.e., lithography, thin film deposition, and dry etching equipment).

DiVincenzo Criteria:

  1. Scalable architecture containing well-defined qubits.
  2. Distinct and reliable qubit state preparation.
  3. Decoherence times much longer than gate operation times.
  4. Universal set of quantum gates that perform accurate operations on the qubits.
  5. Well defined readout capability for each individual qubit.

Physical qubits are a two-level system and can be made of solid-state or non-solid-state devices. This means that the single atoms or clusters of atoms or molecules being used to make a useful qubit can exist in either a solid form of matter or a non-solid (photons, in this case). Devices based on superconducting junctions, quantum dots, nitrogen vacancies, and topological systems are of the solid-state type. Here, solid-state quantum devices will be highlighted. (In the future, we can expect more quantum platforms made of different solid-state materials that are also compatible with the latest manufacturing techniques, so keep this in mind).

In recent decades, nanofabrication techniques have made controllable quantum devices a reality, although quantum devices are not necessarily a sub-field of nanotechnology. It is widely acknowledged that device sizes from 1 to 100 nanometers ( 10 to 1,000 Ångstroms) are of the nanoscale. In this range, it is widely known that quantum effects are more likely to occur and are more observable in measurement. (Measurement is usually performed physically or converted into an electronic signal that can be easily recorded for analysis to confirm quantum behavior). As a result, many fabricated quantum devices are made of nanometer structures, typically in the vertical direction. One can make a quantum device that uses $<100$ nanometers of individual layer thickness in the vertical direction while having micrometer dimensions in the lateral direction or one with $<100$ nanometer dimensions for both vertical and lateral directions.

For nanoscale features, optical (light) microscopes have difficulty in imaging, physically limited by the wavelength of light. Thus, an electron microscope or other specialized imaging system which uses wavelengths shorter than light are needed to properly view nanoscale objects while engineering a device.

The word "lithography" comes from the German word "lithographie," a combination of the ancient Greek words líthos, meaning "stone," and gráphein, meaning "to write." In the context of nanotechnology manufacturing, lithography is referred to as the development of so-called oneand two-dimensional structures. Here, at least one of its dimensions is in the nanometer range. Lithography allows one to copy patterns from computer generated designs onto an underlying substrate with a compatible adhesion layer. (A substrate is a type of supporting foundation, usually a wafer, while an adhesion layer promotes bonding between the substrate and film of interest). There are two sub-categories of lithography: masked and maskless. One may also hear the term direct-write, which refers to maskless exposure techniques. The masked exposure technique is basically like using a stencil, which allows one to draw designs repeatedly onto a surface by guiding a writing source through cut-out patterns.

General lithography is further divided into photolithography, electron-beam lithography, X-ray and extreme ultraviolet lithography, focused ion beam lithography and neutral atom beam lithography, soft lithography, colloidal lithography, nanopattern/ imprinting lithography, scanning (thermal) probe lithography, atomic force microscope lithography, etc. Each method involves energy exposure to a specific area with either the help of beam control systems or a patterned mask.

The two approaches for general manufacturing are called top-down, which involves cutting away pieces of a bulk material, and bottom-up, which involves growing or assembling atoms and molecules into larger structures. These two methods are applied in nanofabrication. Since thin film etching is a top-down process, while thin film growth and nanomolding is a bottom-up process, lithography is considered to be a hybrid method since it can use either or both processes. Nanomanipulation and nanoimprinting are examples of mostly bottom-up fabrication techniques. Dry (physical) etching and wet (chemical) etching methods correlate to anisotropic and isotropic profiles, respectively. (A profile or side profile is referred to as a cross-sectional view).

Vacuum deposition chambers, their support systems, and interfaces can be seen in fabrication laboratories virtually everywhere. The two main types of deposition chambers are physical vapor deposition and chemical vapor deposition. These systems support the growth of material multilayers on sample substrates, such as $\mathrm{SiO}_{2}$ or MgO wafers. Common deposition techniques include sputtering, molecular beam epitaxy, atomic layer deposition, electroplating, and electron-beam evaporation, just to name a few. Each has its own advantages and disadvantages in terms of cost, complexity, reliability, scalability, application, and deposition rates. One may also hear the term stack engineering, which refers to the research and development on the improvement of thin film performance. Additionally, lithography, deposition, and etching of thin films can be predicted or simulated with physics-informed modeling using premade paid software or a scientific programming language such as Python. (Examples can be found on the GitHub platform). The computed results can then be 3D animated and analyzed to help inform parameters used on real nanofabrication equipment, with the added benefit of cost-savings.

Improving nanotechnology manufacturing methods enables innovative approaches for solving quantum hardware problems every day. To develop quantum devices, it usually begins with an idea on paper, where a device circuit or cross-sectional diagram of one eventually will become a real chip. One may choose to hand draw the ideas. Then, once the overall device function is principally understood, it can be translated to a software design application, such as Autodesk AutoCAD. Geometries can be modified and drawn to-scale on the software so that layers of the chip can overlap, interface, or connect with each other as intended. In more complicated designs, the steps can be programmed and automated using layout processing software.

From here, the design can easily be converted into a machine code by exporting specific file formats, with coordinates that a lithography machine can understand. The converted design file creates a virtually marked pathway to guide or control the beam or write head in a lithography machine. However, before it is uploaded for lithography, it should pass inspection for quality assurance and troubleshooting. Afterwards, the final machine code for patterning can be uploaded. From here, a prepared sample containing necessary (thin film) material layers for devices can be loaded for proper lithography alignment and exposure for polymerization.

When the initial lithography step is completed, the sample will be ready for etching, followed by deposition and planarization of required dielectrics, metals, or non-metal layers until the devices are finished and ready for testing. Sometimes, an extra step to add a device to a larger chip architecture or packaging is performed, including wire bonding. In the many pictures of quantum devices and processors you may find by means of the internet or in books, the exposed wire bonds and leads can be seen connecting the chip to its packaging. It is the typical appearance of a finished test sample. For industrial-scale quantum device samples that are being mass manufactured, wire bonded components are sealed within the packaging, like the case with classical semiconductor chips. For high-density quantum chips, the packaging interface may involve bump bonding with superconducting metal that remains malleable under cryogenic conditions, such as indium for example.

Notice that the general process described above is very similar to the scenario for 3D printing or computer numerical control (CNC) machining. (It involves design files that are converted into G-codes, which guide the printer or milling heads to their locations on a printing or milling stage, using $\mathrm{X}-\mathrm{Y}-\mathrm{Z}$ coordinates. Coordinates are just the numerical values that are mapped out on a surface, layer-by-layer).

A General Process Flow for Fabricating Quantum Chips Using a Top-Down Method Part 1: Idea for Device(s) $\rightarrow$ Hand Drawing of Device(s) (Top-Down/ Cross-Section View) $\rightarrow$ Layout Preparation ('Blueprint') $\rightarrow$ Design Inspection $\rightarrow$ Material Selection for Sample Layers $\rightarrow$ Deposit Sample Materials (Thin Films) on Substrate.

Part 2: Prepare Sample for Lithography $\rightarrow$ Import Layout File into Lithography Equipment Software $\rightarrow$ Load Sample into Equipment $\rightarrow$ Perform Lithography Alignment (X-Y Reference Points) $\rightarrow$ Expose Sample $\rightarrow$ Develop Lithography Resist on Sample $\rightarrow$ Dry Etch Sample $\rightarrow$ Prepare Sample for Additional Lithography & Etching Steps by Repeating Part 2 as Needed.

Part 3: Electrode Contact Deposition $\rightarrow$ Post Processing, Wire Bonding, & Packaging $\rightarrow$ Device Testing.

(Note: an inspection process is typically implemented at the end of each step).

If one wanted to visualize the engineering of atoms into nanostructures that can support quantum information systems, below are some ideas for intuition. The entire fabrication process is like preparing a multi-layered bakery item (e.g., cake), which gets sliced up into pieces and sculpted into arbitrary 3D shapes. (In the supplementary images, you can see an example of how a cake is formed into unique shapes by this description). Another analogy for the process of nanofabrication is the stacking of LEGO bricks, which too can be separated into groups of unique shapes. As a metaphor, each individual brick is the representation of an atom, some of which are slightly larger than others, yet still interlinkable overall.

By examining a close-up of atoms through an imaging system that supports atomic resolution modes, one can observe arrangements of dots. These dots displayed on such a microscope (e.g., transmission electron microscope or scanning tunneling microscope) are more like representations of atoms, based on the interaction of electrons around each atom with the beam or probe being used to scan a sample. Although you cannot distinguish between individual electrons or components of the nuclei in each atom being scanned in the microscope, it is possible to measure things like interatomic spacing and crystallinity. In other words, one can choose to inspect nanostructures of fabricated samples using atomic resolution imaging techniques to check on how organized or unorganized its atoms are.

It is useful to combine electron imaging with other surface analysis methods to doublecheck on how well atomic layers will adhere or interface with each other. Diffusion barriers, tunnel barriers, and blockades are also closely inspected using the above-mentioned techniques in solidstate nanostructures. These layers typically exist at device interfaces and serve the purpose of filtering out states or impurities that may move from region to region based on applied heat, voltage, current, field, etc. Therefore, it is worth performing a cross-sectional inspection of the multilayers before patterning and optionally after a prototype chip has been patterned.

In conclusion, nanotechnology is a highly interdisciplinary STEM field that is applicable to quantum technology yet does not contain quantum as a specific sub-category. It is an indispensable tool for realizing the platforms that host quantum information systems and processing. On the other hand, quantum technology as a field does contain a sub-category in hardware that covers nanotechnology and its related applications. This is where quantum chips and devices are discussed. To build the chip hardware at the bottom of the quantum stack requires an understanding of manufacturing at the atomic and nanoscale. Precision control and fine tuning of systems are key ideas of the intersection between both technologies. They can be leveraged to meet the sustainability needs of tomorrow and the distant future.

Supplementary Images:

Overview of the Full Quantum Stack vs. the Engineering Cycle of Circuit Quantum Electrodynamics (cQED) Device (Gao at al., PRX Quantum, 2021).

Detailed Schematic of the Measurement Configuration for a Quantum Processor Containing Two Single-Electron Spin Qubits from Quantum Dots (Watson et al., Nature, 2018).

Stencil Cut-Out [Left] vs. Lithography Exposure Mask [Right] (Onri Jay Benally) & (Kumar et al., Synthesis of Inorganic Nanomaterials, 2018).

Dark Field & Light Field Images Taken Using a Scanning Transmission Electron Microscope (STEM). Shown is Crystalline Structure of Atoms From a SrTiO3 Thin Film Sample. The Colored Dots Represent Positions of Atoms. Green: Strontium, Red: Oxygen, & Grey: Titanium. (Wikimedia Commons).

Example of G-Code Used in Both Top-Down and Bottom-Up Manufacturing. Application Includes But is Not Limited to LASER Cutting, CNC Machining, and 3D Printing (howtomechatronics.com).

Reference Points Highlighted in Light Blue. Electron-Beam Lithography System [Left], Fused Deposition Modeling 3D Printer [Center], Computer Numerical Control Milling Machine [Right] (Onri Jay Benally) & (Protolabs).

Layout of a General Chipset Manufacturing Process (Ezratty, Understanding Quantum Technologies, 2022).

Example of a Quantum Chip Design Process Flow in Preparation for Direct-Write Electron-Beam Lithography Exposure (Onri Jay Benally).

Collection of Unpatterned & Patterned Spintronic Chips [Left]. Self-Portrait Containing a Raith EBPG 5000+ Maskless Electron-Beam Lithography System in the Background [Right] (Onri Jay Benally).

Image Collection of Deposition, Etching, Lithography, and Testing Equipment From the (Nano Magnetism & Quantum Spintronics Lab) & (Minnesota Nano Center), Located at the University of Minnesota-Twin Cities, USA (Onri Jay Benally).

Wide Shot of the Cryogenic Lab within the Quantum Device Lab (Google Quantum AI).

Randomized Micropattern Example of a 2-Step Lithography Mask Drawing Performed in AutoCAD, Containing Rough & Fine Alignment Markers (Onri Jay Benally).

Example of a Multi-Step Lithography Pattern Layout of 6 Superconducting Qubits Converted from an Automated GDS Design File in Qiskit Metal to an AutoCAD Drawing for Inspection (Onri Jay Benally).

416465034-18b225b5-794a-4dae-8e5d-aaf4cfc6d73c Example of a Generic Crossbar Array Layout Shown as an AutoCAD Drawing with Tiny Square Alignment Markers Near the Corners of the Chip (Onri Jay Benally).

Two Fully Fabricated Samples That Employ Electron Spin-Dependent Quantum Tunneling for Efficient Classical Memory in Spintronic Devices Called Spin-Orbit Torque Magnetic Tunnel Junctions (SOT-MTJs). Applications Include but are Not Limited to Magnetic Random-Access Memory, Spin Logic Arrays, & Spin-Based Oscillators (Onri Jay Benally).

54160342209_9df8e2ae41_o Example of a Superconducting Quantum Circuit Layout Prepared in KLayout and Subsequently Rendered with Raytracing Techniques in Blender (Onri Jay Benally).

3D Model Cross-Section of An Integrated Device Containing Many Layers Of Deposited, Lithographed, Etched, & Polished Metal (Conductors), Oxides, Nitrides, & Semiconductors (Wikimedia Commons - KAIST).

A Multi-Layered Application Specific Integrated Circuit on Silicon (IBM Research).

3D Model of a Quantum Integrated Circuit (Veldhorst et al., Nat Commun, 2017).

A Portrait of Hans Christian Ørsted That Was Nanopatterned and Subsequently Scanned with an Atomic Force Microscope Probe on the Same Machine, a Heidelberg NanoFrazor ${ }^{\circledR}$ Scanning Thermal Probe Lithography System (Technical University of Denmark-Physics & Heidelberg Instruments).

Schematic of a Scanning Tunneling Microscope Used to Image the Topology of a Material or Device Surface at the Atomic Level (Michael Schmid & Grzegorz Pietrzak, CC BY-SA 2.0 at, https://commons.wikimedia.org/w/index.php?curid=89194170).

A Desktop Scanning Tunneling Microscope (STM) Capable of Atomic-Level Resolution (Nanosurf).

Setup of a Scanning Tunneling Microscope, Used to Capture Images of Single Atoms or Manipulate Their Position on a Substrate (IBM Research).

Illustration and Images of a Nanoparticle-based Single-Electron Transistor (SET), with an Arrangement of Source, Drain, and Gate Electrodes. The Last Two Images on the Bottom Show Both Scanning & Transmission Electron Micrographs of the Device (Bitton et al., Nat. Commun., 2017).

Chip Layout & Wafer Fabricated by Complementary Metal Oxide Semiconductor (CMOS) Processes for Quantum Photonic Circuits (Bao et al., Nature Photonics, 2023).

Example of Cascaded Mach-Zehnder Interferometers (MZIs) on a Cryogenically Compatible Quantum Photonics Chip. The Piezo-Optomechanical Components are Designed to Impart Strain on the Optical Waveguides for Chip Control. (Dong et al., Nat. Photon., 2021).

A Close-Up of Gold Wire Bonds on an Oxford Surface Ion Trap Chip (Jeff Sherman, 2009).

A Modular Cryogenic Circuit Board Containing Digital-To-Analog Converters & Analog-ToDigital Converters, for Interfacing Solid-State Qubits with Commercially Available FieldProgrammable Gate Arrays (FPGAs). Its Purpose is Qubit Readout & Control (Reilly, npj Quantum Inf, 2015).

416463711-b38fc75a-c5b4-4ff9-8bf7-c634c6040223 Example of a Compact Sub-Kelvin Measurement Configuration Using Commercially Available Complementary Metal Oxide (CMOS) Multiplexer (Wuetz et al., npj Quantum Inf, 2020).


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A Sample of Equations & Formulas for Noise Types in a Dilution Refrigerator

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